Yagyensh (Buno) C. Pati A. James Clark School of Engineering, University of Maryland
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Inducted in October 2009 for developing phase-shift lithography and attendant processes and technologies to enable production of subwavelength integrated circuits and thereby greatly expand the functional capabilities of electronic devices. Buno Pati developed the phase-shift lithography process for the design and manufacture of subwavelength integrated circuits, and founded
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All Inductees A. James Clark School of Engineering, University of Maryland
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E@M Magazine, Fall 2010 by A. James Clark School of Engineering University of Maryland - Issuu
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Yagyensh (Buno) C. Pati A. James Clark School of Engineering, University of Maryland
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E@M Magazine, Fall 2010 by A. James Clark School of Engineering University of Maryland - Issuu
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E@M Magazine, Fall 2010 by A. James Clark School of Engineering University of Maryland - Issuu
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All Inductees A. James Clark School of Engineering, University of Maryland
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E@M Magazine, Fall 2010 by A. James Clark School of Engineering University of Maryland - Issuu
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E@M Magazine, Fall 2010 by A. James Clark School of Engineering University of Maryland - Issuu
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A. James Clark School of Engineering - Wikipedia
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All Inductees A. James Clark School of Engineering, University of Maryland